| Tribological Properties of DLC Film Prepared by C ^＋ Ion Beam-assisted Deposition （IBAD） |
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| 作者姓名： | BAI Xiuqin Peter Boehm LI Jian YAN Xinping |
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| 作者单位： | [1]Reliability Engineering Institute, Wuhan University of Technology, Wuhan 430063 [2]IAVF Antriebstechnik, AG 76187 Karisruhe, Germany [3]Wuhan Research Institute of Materials Protection, Wuhan 430030, China |
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| 摘 要： | C ^＋ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon （ DLC ） film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nanoindentation , the DLC film has been recognized as hydrogenated DLC film and its tribologicul properties have been evaluated. The bull-on-disc testing results show that the hardness and the tribologicul properties of the DLC film produced by C^ ＋ ion beam- assisted deposition are improved significantly. DLC film produced by C ^＋ ion beam- assisted deposition is positive to have a prosperous tribologicul application in the near future.
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| 关 键 词： | DLC film C ^＋ ion beam- assisted deposition （IBAD） tribological properties |
| 收稿时间： | 2004-02-24 |
| 修稿时间： | 2005-05-23 |
Tribological properties of DLC film prepared by C+ ion beam-assisted deposition (IBAD) |
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| BAI Xiuqin Peter Boehm LI Jian YAN Xinping.Tribological properties of DLC film prepared by C+ ion beam-assisted deposition (IBAD)[J].Journal of Wuhan University of Technology. Materials Science Edition,2006,21(1):49-52. |
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| Authors: | Bai Xiuqin Peter Böhm Li Jian Yan Xinping |
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| Affiliation: | (1) Reliability Engineering Institute, Wuhan University of Technology, 430063 Wuhan, China;(2) IAVF Antriebstechnik, AG 76187 Karlsruhe, Germany;(3) Wuhan Research Institute of Materials Protection, 430030 Wuhan, China |
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| Abstract: | C~+ ion beam-assisted deposition was utilized to prepare deposit diamond-like carbon(DLC) film. With the help of a series of experiments such as Raman spectroscopy, FT-IR spectroscopy, AFM and nano-indentation, the DLC film has been recognized as hydrogenated DLC film and its tribological properties have been evaluated. The ball-on-disc testing results show that the hardness and the tribological properties of the DLC film produced by C~+ ion beam-assisted deposition are improved significantly. DLC film produced by C~+ ion beam-assisted deposition is positive to have a prosperous tribological application in the near future. |
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| Keywords: | DLCfilm C ion beam- assisted deposition (IBAD) tribological properties |
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