多层共烧氮化铝陶瓷金属化工艺研究

氮化铝陶瓷因其热导率高、绝缘性好以及无毒害等特点在许多领域有着广泛的应用。多层共烧氮化铝陶瓷是采用厚膜印厣j的方式将多层的电路金属化做入氮化铝基板并在特定气氛中高温烧结的一种高性能陶瓷。金属化是多层共烧氮化铝陶瓷的一个关键工艺，文章主要介绍了对金属化工艺的研究。重点研究了其中的印刷工艺、叠片层压工艺和烧结工艺。通过对印刷和烧结参数的研究，使得生产陶瓷的热导率大于170W（m·K）^-1，金属化的方阻小于18mΩ／□，金属化的抗拉力大于1．8N（1mm^2焊接面积），能满足大功率LED封装、大功率功率管封装的性能要求，已经在多种陶瓷外壳和基板中应用。

Research of Metallization Process of Multilayer Co-fired AIN Ceramic

AlN ceramic is widely used in many fields because of its high thermal conduction,good insulation and innocuity.Multilayer co-fired AlN ceramic is a type of high performance ceramic that is printed in thick film to form multilayer circuit and fired in a certain atmosphere in high temperature.Metallization is a key process of multilayer co-fired AlN ceramic.The paper introduces the research of multilayer co-fired AlN ceramic metallization process.The process of printing,stacking,laminating and firing is studi...