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| 柱面面形干涉测量 | |
| 引用本文： | 于瀛洁,许海峰,彭军政. 柱面面形干涉测量[J]. 计量学报, 2015, 36(5): 460-463. DOI: 10.3969/j.issn.1000-1158.2015.05.03 |
| 作者姓名： | 于瀛洁 许海峰 彭军政 |
| 作者单位： | 1.上海大学精密机械工程系, 上海 200072; 2.深圳大学光电工程学院, 深圳 518060 |
| 基金项目： | 国家自然科学基金（51175318）; 国家重大科技专项（2013ZX04006011-217） |
| 摘 要： | 介绍了一种柱面面形干涉测量方法。该方法选用计算全息片作为柱面波转换器,能够将平面干涉仪出射的平面波转换成理想柱面波前,依此为基础,建立了柱面干涉测量系统,能够实现柱面的干涉测量。为了获得柱面的真实面形误差,分析了调整误差引起的失调像差,并给出了失调像差的分离方法。最后,以玻璃圆柱体为被测样本,对单孔径面形的重复性进行验证,20次测量结果峰谷值（PV）标准差为20.2 nm,为PV平均值的0.55％。 |
| 关 键 词： | 计量学 柱面面形 干涉 柱面波转换器 计算全息片 调整误差 |
The Interferometric Method for the Cylindrical Surface |
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| YU Ying-jie,XU Hai-feng,PENG Jun-zheng. The Interferometric Method for the Cylindrical Surface[J]. Acta Metrologica Sinica, 2015, 36(5): 460-463. DOI: 10.3969/j.issn.1000-1158.2015.05.03 | |
| Authors: | YU Ying-jie XU Hai-feng PENG Jun-zheng |
| Affiliation: | 1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China; 2. College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China |
| Abstract: | An interferometric method to measure the cylindrical surface is proposed. The computer generated hologram was used as wavefront converter, which can convert the plane wavefront into cylindrical wavefront. With it, a cylindrical interferometric system was built. To get the real surface figure of the tested cylindrical surface, a misalignment aberrations removal method is also proposed .Lastly, several experiments were carried out to validate the proposed method and system, where the glass cylinder was chosen as a target. The repeatability of single aperture measurement was investigated by measuring the target 20 times. The standard deviation (PV) is 20.2 nm that is 0.55% of the average value of PV. |
| Keywords: | metrology cylindrical surface interferometry cylindrical wave converter CGH adjustment errors |
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