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Change in Oxygen Content of Y2O3-Nd2O3-Doped Silicon Nitride During Firing
Authors:Naoto Hirosaki  Akira Okada
Affiliation:Scientific Research Laboratory, Central Engineering Laboratories, Nissan Motor Company, Ltd., Natsushima-cho-1, Yokosuka, Kanagawa 237, Japan
Abstract:The oxygen content of silicon nitride with 1 mol% Y2O3—Nd2O3 additive was measured after firing to determine the compositional change during gas-pressure sintering. Oxygen content decreases from 2.5 to 0.94 wt% during firing for 4 h at 1900°C and 10-MPa pressure in N2. This decrease in oxygen results from the release of SiO gas generated by a thermaldecomposition reaction between Si3N4 and SiO2. The resultant sintered silicon nitride material contains less than 1 wt% oxygen.
Keywords:sintering    yttria    neodymium oxide    silicon nitride    firing
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