| Parylene敷形涂层 |
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| 引用本文： | 吴礼群. Parylene敷形涂层[J]. 电子机械工程, 2004, 20(6): 51-53,61 |
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| 作者姓名： | 吴礼群 |
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| 作者单位： | 南京电子技术研究所,江苏,南京,210013 |
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| 摘 要： | Parylene是一种性能优异的高聚合物材料，它能涂敷到各种形状的表面，例如金属、玻璃、纸张、树脂、塑料、陶瓷等。简述了Parylene涂层的性能，对Parylene涂层的沉积过程、沉积设备和Parylene涂层的应用领域进行了论述，并对Parylene涂层的性能与环氧树脂、有机硅树脂、聚氨酯涂层的性能进行了比较。
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| 关 键 词： | Parylene 气相沉积 敷形涂层 |
| 文章编号： | 1008-5300(2004)06-0051-03 |
Parylene Conformal Coating |
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| WU Li-qun. Parylene Conformal Coating[J]. Electro-Mechanical Engineering, 2004, 20(6): 51-53,61 |
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| Authors: | WU Li-qun |
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| Affiliation: | Nanjing Research Institute of Electronics Technology |
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| Abstract: | Parylene is a conformal protective polymer coating material utilized to uniformly protect any component surface configuration on diverse substrates such as metal, glass, paper, resin, plastic, ceramic etc. This article introduces deposition process of parylene, properties of parylene, applications of parylene and parylene deposition equipment. The properties are compared with those reported for other conformal coating materials such as epoxides, silicones, and urethanes. |
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| Keywords: | parylene vapor phase deposition conformal coating |
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