Anisotropic etching of silicon crystals in KOH solution |
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Authors: | C. R. Tellier A. Brahim-Bounab |
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Affiliation: | (1) Laboratoire de Chronométrie Electronique et Piézoélectricité, Ecole Nationale Supérieure de Mécanique et des Microtechniques, La Bouloie, Route de Gray, 25030 Besancon Cedex, France |
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Abstract: | The anisotropic etching behaviour of various crystalline silicon plates in an aqueous KOH solution was studied. Variations of the etch rate with the angle of cut related to singly-rotated plates have been determined and orientation effects in the out-of-roundness profiles related to various {h k 0} sections have been analysed in terms of crystal symmetry. In addition, changes in the surface texture with crystal orientation were systematically investigated. All the experimental results furnished evidence for a dissolution process governed by the crystal orientation. A procedure has been proposed to derive the dissolution slowness surface from experiments starting from a tensorial representation of the anisotropic etching. |
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