六自由度压电微动平台测量系统开发

针对精密机械以及精密加工等领域需要纳米级的定位精度,开发出由三组二自由度高精度测量模组组成的六自由度压电微动平台。该平台通过NI软硬设备的有效整合,改变压电制动器移动量,调整微动平台六自由度实现定位。通过三组二自由度测量模组输出的二维光点坐标,测量六轴微动平台位移参数。同时对各模组的安装误差采用正角度补偿和雷射角度补偿,以满足平台高精度需求。经过综合测试表明,系统线性解析度达到10nm,角度解析度为0.1arcsec,系统位移跳动量0.022μm,角度跳动量为0.06 arcsec,能达到即时精确定位。

Development of Measurement System Based on 6-DOF Piezoelectric Micromotion Platform

Aiming at nano-scale positioning precision required in the field of precision machinery and precision machining,the 6-DOF piezoelectric micro-moving platform consisting of three groups of two degrees of freedom precision measurement module is developed.With the effective integration of NI hardware and software platform,it's available to position by adjusting micromotion platform and changing the piezoelectric actuator movement amount.Depending on the two-dimensional optical coordinates outputted by three sets of two degrees of freedom measurement module,the displacement parameters of six-axis micromotion platform are measured.Meanwhile the installation errors of each module are compensated with positive angle correction and laser angle,in order to meet the needs of high-precision platform.Through system comprehensive testing,it shows that the linear resolution reaches 10nm,with angle resolution of 0.1 arcsec,system displacement variation of 0.06 arcsec,and the angle variation of 0.06 arcsec,the purpose of real-time precise positioning can be achieved.