Electron emission in 10–100 keV H and He grazing ion-surface collisions

We have measured energy distributions of electrons ejected during grazing 10–100 keV H⁺ and He⁺ ions scattering from Si surfaces for a broad range of electron observation angles. The distributions have contributions strongly dependent on the directions of incidence and observation. For observation regions around the specular reflection of the ions we have studied the angular dependence of the electron structure resulting from electron transfer to the continuum of the effective ion potential. Far from the ion scattering plane we have observed the Si Auger electron spectrum. We discuss the differences between the Auger peaks obtained by electron and grazing proton bombardment of Si surfaces partially covered with O₂ and Al.