Design and fabrication of a micromachined resonant gyroscope

The micromachined gyroscope is rapidly gaining popularity as a rate sensor for application in areas such as automotive and aerospace systems, where low power consumption, high sensitivity, low temperature drift and good stability are prerequisites. In this paper, the overall design and fabrication process of a reactive ion-etched inertial resonant gyroscope based on the capacitive sensing principle is reported. The experimental results are also discussed.