Affiliation: | 1. Central Research Laboratory, Hitachi, Ltd., 1, Kirihara-cho, Fujisawa, Kanagawa, 252-8588, Japan 2. Department of Micro-Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi, 464-8603, Japan 3. Mechanical Engineering Research Laboratory, Hitachi, Ltd., 832-2, Horiguchi, Hitachinaka, Ibaraki, Japan
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