Effect of the Tempor al Ch ar acteristics of Modul ated DC Pl asm a with the (SiH4–Ar–O2) G as Ph ase on ncl-Si Growth in an a-SiOx:H m atrix ($${{C}_{{{{{text{O}}}_{{text{2}}}}}}}$$ = 15.5 mol %) 期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Effect of the Tempor al Ch ar acteristics of Modul ated DC Pl asm a with the (SiH4–Ar–O2) G as Ph ase on ncl-Si Growth in an a-SiOx:H m atrix ($${{C}_{{{{{text{O}}}_{{text{2}}}}}}}$$ = 15.5 mol %)

摘要：
本文献已被 SpringerLink 等数据库收录！