| 气体传感器中的厚薄膜技术 |
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| 引用本文： | 易惠中. 气体传感器中的厚薄膜技术[J]. 传感器与微系统, 1992, 0(1): 1-7 |
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| 作者姓名： | 易惠中 |
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| 作者单位： | 国营4322厂 |
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| 摘 要： | 厚薄膜技术已广泛用于制作气体传感器,在气敏技术中起重要作用。综述了在气体传感器制造中使用的厚薄膜技术,包括厚膜、薄膜、超微粒子薄膜和LB膜技术。
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| 关 键 词： | 气体传感器 厚膜 薄膜 超微粒子薄膜 LB膜 |
Thick Film and Thin Film Techniques in Manufacturing Gas Sensors |
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| Yi HuiZhong. Thick Film and Thin Film Techniques in Manufacturing Gas Sensors[J]. Transducer and Microsystem Technology, 1992, 0(1): 1-7 |
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| Authors: | Yi HuiZhong |
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| Affiliation: | State-owned 4322 factory |
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| Abstract: | Thick film and thin film techniques play an important role in gas sensing techniques, which have been widely used in manufacturing the sensors. Thick film and thin film techniques used for gas sensors, including thick film technique, thin film technique,ultra-fine particles film and L-B film are described. |
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| Keywords: | Gas sensor Thick film Thin film Ultra-fine particles film L-Bfilm |
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