Wolter I型反射镜面形在线检测装置设计

由于传统的基于干涉原理的测量方法无法对用于太阳X射线成像仪的Wolter I型旋转非球面反射镜进行检测,本文提出了一种在线检测此类反射镜面形的方法。以长程轮廓测量仪的原理为基础,经过改进、整合测量装置并在扫描机构中加入五角棱镜转折光路,搭建了一套Wolter I型旋转非球面反射镜面形检测装置,并对该装置的工作原理、结构参数设定以及数据处理算法等进行了研究。用一块标准平面反射镜作为基准面对该装置定标,并通过实测反射镜样品进行验证实验。实验结果表明:该装置的倾斜度测量误差为RMS 6.7 μrad,重复精度为0.75 μrad,轮廓测量精度约为PV 0.24λ,RMS 0.07λ,基本满足设计要求。

Design of online measuring device for surface profile of Wolter Type I mirror

As traditional interference-based measurements can not be suited to measure the surface profile of the Wolter Type I revolving aspheric mirror, a new method was proposed to measure this kind of mirror in this paper. On the basis of a Long Trace Profiler (LTP), a new measuring device was also established by introducing a pentaprism into the scanning mechanism for ray turning. The working principles, structure parameters and data processing algorithms of the device were investigated, then a standard plane mirror was used as the reference to calibrate the device. Finally, a mirror sample was measured to verify the measuring device. Experimental results indicate that designed device can achieve the slope error of RMS 6.7 μrad , repeatability of 0.75 μrad and the height profiles of PV 0.24λ and RMS 0.07λ, which meets the design requirements basically.