Z variations in yields of multicharged ions scattered and recoiled from a silicon surface

The doubly charged and triply charged ion yields from keV ion-silicon surface scattering are found to have a strong dependence on the atomic number Z₁ of the incident ion. For Z₁ < Z₂ the yield of scattered multicharged ions increases with Z₁, so that these ions dominate the recoiling Si²⁺ and Si³⁺ ions by Z₁ = 9. In contrast, when Z₁ > Z₂, there are large yields of Si²⁺ and Si³⁺ ions, and the multicharged scattered ion yields are too small to detect. The interaction radius at which shell vacancies are produced is also found to change, suggesting that electron promotion occurs at a different level crossing on either side of Z₁ = Z₂.