3-Omega Method for Thin Films with the Non-Fourier Boundary Condition |
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| Authors: | S Shenoy |
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| Affiliation: | Department of Mechanical Engineering and Materials Science , Rice University , Houston , Texas , USA |
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| Abstract: | The effect of non-Fourier boundary condition on the 3-omega method for measuring the thermal conductivity of microscale thin films using the hyperbolic heat conduction equation and the Fourier equation is examined. Non-Fourier boundary condition with the Fourier equation leads to 80% error in the temperature oscillations and increases the error to 85% in the case of non-Fourier boundary condition with the hyperbolic heat conduction equation. The solution of the non-Fourier boundary condition with the hyperbolic heat conduction equation gives the most accurate thermal conductivity expression. The analysis also provides a method for determining the relaxation time of thin films. |
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