| 玻璃衬底和Si衬底制备的Zn0.96Nd0.04O薄膜的结构研究 |
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| 引用本文： | 文军.玻璃衬底和Si衬底制备的Zn0.96Nd0.04O薄膜的结构研究[J].中国材料科技与设备,2009,6(4):48-50. |
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| 作者姓名： | 文军 |
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| 作者单位： | 渭南师范学院物理与电子工程系,陕西渭南714000 |
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| 基金项目： | 基金项目：陕西省教育厅科研计划资助项目（08JK287）;渭南师范学院科研基金项目（09YKS004） |
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| 摘 要： | 通过射频磁控溅射技术在玻璃衬底和Si（111）村底上制备了Zn0.96Nd0.04O薄膜。XRD分析表明，Zn0.96Nd0.04O薄膜是具有C轴择优生长的纳米多晶薄膜，Nd以替位原子的形式存在于ZnO晶格，Nd掺杂没有改变ZnO晶格结构。从AFM图中看出，薄膜表面形貌较为粗糙，Si衬底薄膜的晶粒具有规律且晶粒尺寸大于玻璃衬底。
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| 关 键 词： | Nd掺杂 ZnO薄膜 XRD AFM |
Investigation of Structural of Zn0.96Nd0.04O Thin Films Grown on Glass and Si Substrate |
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| WEN Jun.Investigation of Structural of Zn0.96Nd0.04O Thin Films Grown on Glass and Si Substrate[J].Chinese Materials Science Technology & Equipment,2009,6(4):48-50. |
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| Authors: | WEN Jun |
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| Affiliation: | WEN Jun (Department of Physics and Electronic Engineering , Weinan Teachers University, Shaanxi, Weinan, 714000, China) |
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| Abstract: | The Zn0.96Nd0.04O thin films were deposited on glass substrate and Si（111） substrate by RF magnetron sputte- ring, The X-ray diffraction（XRD） analysis revealed that Zn0.96Nd0.04O thin films was highly c-axis orientation and the thin films are nano-multi-crystal. The films with roughness surface morphology were observed by atomic force microscopy （AFM）, the thin films＇ grains which on Si substrate was larger than glass substrate. |
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| Keywords: | Nd-doped ZnO thin film XRD AFM |
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