Role of deposition parameters on microstructure and mechanical properties of chromium oxide coatings |
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Authors: | Fei Luo Huisheng Yang Yanbin Wang |
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Affiliation: | Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing, 100083, China |
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Abstract: | Chromium oxide coatings were deposited by reactive magnetron sputtering on high speed steel (HSS) substrate under various oxygen flow rates and radio frequency (RF) powers. The effect of deposition conditions on the microstructure, hardness and critical load of chromium oxide coating failure was studied. The results indicated that a crystalline chromium oxide coating formed at a high oxygen flow rate and a low RF power exhibited a higher hardness and a lower critical load as compared to a chromium oxide coating with an amorphous microstructure. |
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Keywords: | Chromium oxide coating Reactive magnetron sputtering Microstructure Mechanical properties |
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