| 基于MDO的MEMS多物理域耦合设计建模 |
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| 引用本文： | 俞必强,翁海珊,李疆,邱丽芳. 基于MDO的MEMS多物理域耦合设计建模[J]. 机械设计, 2006, 23(11): 10-12 |
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| 作者姓名： | 俞必强 翁海珊 李疆 邱丽芳 |
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| 作者单位： | 北京科技大学,机械工程学院,北京,100083 |
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| 摘 要： | 微机电系（Micro Electro Mechanical Systems，MEMS）涉及多个物理域，多物理域的耦合加大了设计建模的难度。多学科设计优化方法（Multidisciplinary Design Optimization，MDO）是专门针对复杂系统的综合设计优化方法，在处理系统间的相互耦合问题上有着技术和方法上的优势。提出将多学科设计优化方法应用于MEMS的多物理域耦合设计，并对相应的多物理域耦合建模方法作出了分析研究。
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| 关 键 词： | 微机电系统 多学科设计优化 耦合 |
| 文章编号： | 1001-2354（2006）11-0010-03 |
| 收稿时间： | 2005-12-31 |
| 修稿时间： | 2005-12-312006-08-01 |
Coupling design modeling of MEMS multi-physics region based on MDO |
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| YU Bi-qiang,WENG Hai-shan,LI Jiang,QIU Li-fang. Coupling design modeling of MEMS multi-physics region based on MDO[J]. Journal of Machine Design, 2006, 23(11): 10-12 |
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| Authors: | YU Bi-qiang WENG Hai-shan LI Jiang QIU Li-fang |
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| Affiliation: | School of Mechanical Engineering, Beijing University of Science and Technology, Beijing 100083, China |
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| Abstract: | Micro Electro Mechanical System(MEMS) deals with many physics region;the coupling of multi-physics region increases the difficulty of design modeling.Multi-disciplinary Design Optimization(MDO) is a special comprehensive methodology of design optimization in accordance with complicated systems;it has the advantages of techniques and methodology while dealing with problems of mutual coupling between systems.Let the MDO methodology be applied to the coupling design of multi-physics region of MEMS has been put forward,and an analytical study was made on the modeling method of the corresponding coupling of multi-physics region. |
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| Keywords: | micro electro mechanical system(MEMS) multidiscipline design optimization coupling |
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