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MOD法在种子层/Ni-W上制备La0.4Sr0.6TiO3薄膜的研究
引用本文:罗清威,王雪,李风华,冉阿倩,李英楠,樊占国. MOD法在种子层/Ni-W上制备La0.4Sr0.6TiO3薄膜的研究[J]. 功能材料, 2011, 42(1): 40-42,46
作者姓名:罗清威  王雪  李风华  冉阿倩  李英楠  樊占国
作者单位:东北大学材料与冶金学院;
基金项目:国家高技术研究发展计划(863计划)资助项目(2008AA03Z202); 东北大学博士研究生创新资助项目(90602008);东北大学基本科研业务费资助项目(N100602010)
摘    要:采用金属有机沉积法(MOD)在双轴织构的Ni-5%(原子分数)W基带上制备了SrTiO3种子层,然后再在种子层上沉积La0.4Sr0.6TiO3薄膜.SEM图像显示种子层颗粒分布均匀,大小基本一致.通过XRD和SEM研究了不同热处理温度对La0.4Sr0.6TiO3薄膜取向和微观形貌的影响,结果显示,在Ar-4%H2气...

关 键 词:SrTiO3种子层  La0.4Sr0.6TiO3缓冲层  热处理  取向

Preparation of La0.4Sr0.6TiOs films on seed layers/Ni-5% W with metal-organic deposition method
LUO Qing-wei,WANG Xue,LI Feng-hua,RAN A-qian,LI Ying-nan,FAN Zhan-guo. Preparation of La0.4Sr0.6TiOs films on seed layers/Ni-5% W with metal-organic deposition method[J]. Journal of Functional Materials, 2011, 42(1): 40-42,46
Authors:LUO Qing-wei  WANG Xue  LI Feng-hua  RAN A-qian  LI Ying-nan  FAN Zhan-guo
Affiliation:LUO Qing-wei,WANG Xue,LI Feng-hua,RAN A-qian,LI Ying-nan,FAN Zhan-guo (School of Materials & Metallurgy,Northeastern University,Shenyang 110819,China)
Abstract:In this paper,SrTiO3 seed layers were prepared on the biaxially textured Ni-5at%W alloy substrates with metal-organic deposition method(MOD).Then La0.4Sr0.6TiO3 films were deposited on the seed layers.The SEM morphology showed the seed layers' grains distributed uniformly,size was consistently.The effects of different heat treatment temperature on the orientation and morphology of films were studied by XRD and SEM.The results showed that well-oriented,smooth,dense,crack-free and pinhole-free La0.4Sr0.6TiO3 ...
Keywords:SrTiO3 seed layer  La0.4Sr0.6TiO3 buffer  heat treatment  orientation  
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