A1N陶瓷低温烧结过程中氧化控制与性能研究

采用纳米级的A1N粉并以Y2O3-CaF2作烧结助剂于1600℃下制备A1N陶瓷，对AlN陶瓷物相组成、相对密度、微观结构和热性能进行了表征，针对A1N陶瓷烧结过程中易氧化的问题，分析了氮化铝陶瓷在烧结过程中氧化的机理，提出了防止A1N陶瓷制备过程中氧化的措施。研究表明：将A1N坯体置于含有一定量碳粉的A1N埋粉中于N2气氛下烧结，生成还原性气体CO,有效避免了A1N烧结过程中的氧化问题。其中添加3wt％Y2O3-2wt％CaF2作烧结助剂，1600℃常压条件下制备了高热导率的致密A1N陶瓷。

Oxidation Control and Properties Study of AlN Ceramics Sintered at Low-Temperature

AlN ceramics doped with Y2O3-CaF2 were sintered at 1600℃with using nano-sized AlN powders.The density,thermal properties,and AlN phase change and microstructure of sintered AlN ceramics were tested and analyzed.For AlN ceramic’s easy oxidation problems during sintering process,we analysis aluminum nitride ceramics mechanism of oxidation,and the measures is proposed to prevent the oxidation during the preparation of AlN ceramics.The results show that the AlN ceramic’s oxidation problem can be avoided by AlN body buried in a certain amount of AlN and carbon with N2atmosphere.Especially high thermal conductivity and dense AlN ceramics doped with 3wt%Y2O3-2wt%CaF2and sintered at 1600℃are prepared by pressureless sintering at a lower temperature.