| 柔性衬底硅薄膜太阳电池中ZGO薄膜的应用 |
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| 引用本文： | 张德贤,姜元建,蔡宏昆,薛颖,陶科,王林申,赵敬芳,隋妍萍.柔性衬底硅薄膜太阳电池中ZGO薄膜的应用[J].光电子．激光,2009(6):745-748. |
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| 作者姓名： | 张德贤 姜元建 蔡宏昆 薛颖 陶科 王林申 赵敬芳 隋妍萍 |
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| 作者单位： | 南开大学信息科学学院电子科学与技术系; |
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| 基金项目： | 国家高技术研究发展计划资助项目(2006AA05Z422);;天津市科技攻关计划资助项目(06YFGPGX08000);;天津市应用基础及前沿技术研究计划资助项目(08JCYBJC13100) |
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| 摘 要： | 在室温下,采用孪生对靶直流磁控溅射工艺,在玻璃衬底上制备出高质量的Ga掺杂ZnO(ZnO:Ga)透明导电膜。研究了薄膜厚度对薄膜的结构、光学及电学特性的影响。制备的ZnO:Ga是具有六角纤锌矿结构的多晶薄膜,最佳择优取向为(002)方向。随着薄膜厚度的增加,衍射峰明显增强,晶粒增大。优化反应条件,薄膜的电阻率达到4.69×10-4Ω.cm,在可见光范围内平均透过率达到了85%以上。将不同厚度的ZnO:Ga薄膜(350～820 nm)在柔性聚酰亚胺衬底nip非晶硅(a-Si)薄膜太阳电池中,随厚度的增加,电池的填充因子和效率都得到了提高,得到聚酰亚胺衬底效率7.09%的a-Si薄膜太阳电池。
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| 关 键 词： | Gu掺杂ZnO(ZnO:Ga) 磁控溅射 柔性衬底 太阳电池 |
The application of ZnO:Ga thin film to amorphous silicon thin film solar cells on polymer substrate |
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| ZHANG De-xian,JIANG Yuan-jian,CAI Hong-kun,XUE Ying,TAO Ke,WANG Lin-shen,ZHAO Jing-fang,SUI Yan-ping.The application of ZnO:Ga thin film to amorphous silicon thin film solar cells on polymer substrate[J].Journal of Optoelectronics·laser,2009(6):745-748. |
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| Authors: | ZHANG De-xian JIANG Yuan-jian CAI Hong-kun XUE Ying TAO Ke WANG Lin-shen ZHAO Jing-fang SUI Yan-ping |
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| Affiliation: | Department of Electronic Science and Technology;Nankai University;Tianjin 300071;China |
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| Abstract: | Ga-doped ZnO(ZnO:Ga)films are deposited on glass substrates by DC magnetron sputtering using facing zinc oxide targets at room temperature and in argon atmosphere.The structural,electrical and optical properties of the ZnO:Ga films with various thickness are studied in detail.The crystal structure of the ZnO:Ga films is hexagonal wurtzite.The orientation for all the obtained films is along the c-axis perpendicular to the substrate.It is observed that with the increase in film thickness,the crystallite sizes... |
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| Keywords: | Ga-doped ZnO(ZnO:Ga) DC magnetron sputtering polyimide substrate solar cells |
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