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半导体激光器腔面全介质涂层的研究
引用本文:杨晓妍.半导体激光器腔面全介质涂层的研究[J].光学精密工程,1995,3(3):38-41.
作者姓名:杨晓妍
作者单位:长春光学精密机械学院现代光学研究室
摘    要:通过对GaAs/GaAlAs激光器谐振腔前、后腔面蒸镀2rO2和ZrO2、MgF2的工艺过程,从理论和实验上分析涂层特性,透射率、反射率分别由无膜时的68%、32%,镀膜后提高到94%、95.0%以上,提高了激光输出功率和工作寿命,保护了器件端面。

关 键 词:GaAs/AaAlAs激光器  谐振腔  减反射膜  高反射膜
收稿时间:1994-11-14

Study on Dielectric Coatings on Semiconductor Laser cavity surface
Yang Xiaoyan.Study on Dielectric Coatings on Semiconductor Laser cavity surface[J].Optics and Precision Engineering,1995,3(3):38-41.
Authors:Yang Xiaoyan
Affiliation:Modern-Optics LAB, Changchun Institute of Optics and Fine Mechanics, Changchun 130022
Abstract:We have studied theoretically and experimentally the coating characteristics via the tech-nology process of ZrO2 and ZrO2、MgF2 evaporation plating an the front and back cavity Sur-faces of Ga As/GaAlAs Laser.The transmission coefficient and reflective coefficient havebeen changed respectively from 68% and 32%,in the case without coatings,to above 94%and 95%. By this,the device cavity Surfaces have been protected,the out put power in-creased,and lifetime extended.
Keywords:GaAs/AaAlAs lasers  Resonant cavities  Anti-reflective Coatings  high reflecting Coatings  
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