Modification of Piezoelectrics Surfaces by Diamond-Like Carbon Films and Application to SAW Devices |
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| Authors: | SA Zhgoon Q Zhang SF Yoon J Ahn |
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| Affiliation: | (1) Department of Radio Engineer. Fundamentals, Moscow Power Engineering Institute, 14, Krasnokazarmennaja, 111250 Moscow, Russia;(2) School of Electronic and Electrical Engineering, Nanyang Technological University, Block S2, Nanyang Avenue, Singapore, 639798 |
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| Abstract: | Diamond-like carbon (DLC) coatings on single crystal piezoelectrics, such as ST quartz, and Y-Z lithium niobate substrates, have been studied with the aim of providing the designers of Surface Acoustic Wave (SAW) devices with a new palette of different properties of the most useful materials in this field.A process for reliable deposition of DLC films on the surface of the oxide piezoelectrics has been investigated. The properties of these complex structures have been characterized electrically and acoustically. Speeding up of surface acoustic waves by DLC films, with the film thickness of 0.1–2.0  m, on these single crystals has been studied. Useful SAW velocity increase of 0.5–2% has been confirmed.In addition, reflecting arrays have been prepared with slanted periodic DLC strips alternating with Al or Au strips on Y-Z lithium niobate substrate and their reflection properties have been studied. |
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| Keywords: | SAW piezoelectrics velocity reflection |
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