| 静电梳微谐振子直脚型结构的振动特性 |
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| 引用本文： | 丁晓红,陈晓阳,沈雪瑾.静电梳微谐振子直脚型结构的振动特性[J].中国制造业信息化,2000,15(3). |
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| 作者姓名： | 丁晓红 陈晓阳 沈雪瑾 |
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| 作者单位： | 1. 苏州大学,工学院,江苏,苏州,215021
2. 上海大学,轴承研究室,上海,200072 |
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| 基金项目： | 国家自然科学基金!( 5 9875 0 5 5 ) |
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| 摘 要： | 静电梳微谐振子是微机械领域常用的直线型驱动装置。运用梁的理论讨论了一种常见的结构———直脚型结构的振动特性 ,提出了计算结构谐振频率的实用算法。并探讨了影响谐振频率的几何参数 ,得到的结论对静电梳微谐振子的设计具有指导意义
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| 关 键 词： | 直脚型结构 静电梳微谐振子 谐振频率 微机械 |
The Vibrancy Character of Electron-Static Driven Comb Micro-resonant Set with Straight-leg Flexure Structure |
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| Ding Xiaohong,Chen Xiaoyang,Shen Xuejin.The Vibrancy Character of Electron-Static Driven Comb Micro-resonant Set with Straight-leg Flexure Structure[J].Manufacture Information Engineering of China,2000,15(3). |
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| Authors: | Ding Xiaohong Chen Xiaoyang Shen Xuejin |
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| Abstract: | It expounds that the electro-static Driven Comb Micro-resonant set is widely used in the linear driven equipment. Based on the simple beam theory, it analyzes the vibrancy character of straight-leg flexure structure, and derives the practical formula of this structure to calculate the resonance frequency. The paper also discusses some geometric parameters which affects the vibrancy frequencies. The result can be used to design this system. |
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| Keywords: | Straight-leg Flexure Structure Electro-static Driven Comb Micro-resonant Set Resonance Frequency |
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