| 薄膜磁阻传感器及其应用 |
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| 引用本文： | 过壁君. 薄膜磁阻传感器及其应用[J]. 电子元件与材料, 1994, 13(5): 56-59 |
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| 作者姓名： | 过壁君 |
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| 作者单位： | 电子科技大学 |
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| 摘 要： | 利用薄膜工艺和微细加工技术，将ＮｉＦｅ合金或ＮｉＣｏ合金真空蒸镀或溅射在玻璃或石英基片上，制作的磁阻传感器具有广泛的用途。
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| 关 键 词： | 薄膜工艺，磁阻传感器，应用 |
Thin Film Reluctive Sensor and It''''s Application |
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| Guo BiJun. Thin Film Reluctive Sensor and It''''s Application[J]. Electronic Components & Materials, 1994, 13(5): 56-59 |
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| Authors: | Guo BiJun |
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| Abstract: | By use of thin-film technology and microprocessing technique Ni-Fe or Ni-Co alloy is evaporated or sputtered in vacuum onto glass or quartz substrate. Reluctive sensors made in such way have wide application. |
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| Keywords: | thin-film technology reluctive sensor application |
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