| 电阻式半导体气体传感器 |
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| 引用本文： | 张强,管自生. 电阻式半导体气体传感器[J]. 仪表技术与传感器, 2006, 0(7): 6-9 |
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| 作者姓名： | 张强 管自生 |
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| 作者单位： | 南京工业大学,材料科学与工程学院,江苏,南京,210009 |
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| 基金项目： | 江苏省高校科学自然科学基金 |
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| 摘 要： | 综合介绍了电阻式半导体气体传感器的特性，重点对电阻式半导体气体传感器的工作原理、制作方法和加速传感器响应的措施进行了较为详细的阐述。综合该领域国内外研究现状，展望了电阻式半导体气体传感器的发展方向。
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| 关 键 词： | 气体传感器 气敏机理 特性 |
| 文章编号： | 1002-1841（2006）07-0006-04 |
| 收稿时间： | 2005-09-26 |
| 修稿时间： | 2006-02-09 |
Gas Sensors of Electric Resistance Semiconductors |
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| ZHANG Qiang,GUAN Zi-sheng. Gas Sensors of Electric Resistance Semiconductors[J]. Instrument Technique and Sensor, 2006, 0(7): 6-9 |
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| Authors: | ZHANG Qiang GUAN Zi-sheng |
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| Affiliation: | College of Materials Science and Engineering, Nanjing University of Technology, Nanjing 210009, China |
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| Abstract: | The multiple characteristics of gas sensors of electric resistance semiconductors were discussed. The working mechanism, fabrication of gas sensors and methods of increasing sensitivity were introduced in detail, respectively. Based on the studies in this field, the developing tendency of the gas sensors of the electric resistance semiconductor were prospected. |
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| Keywords: | gas sensor sensing mechanism characteristic |
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