| 退火对牺牲层腐蚀前端形状和腐蚀速率的影响 |
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| 引用本文： | 吴昌聚,郁发新,金仲和,马慧莲,王跃林. 退火对牺牲层腐蚀前端形状和腐蚀速率的影响[J]. 仪器仪表学报, 2006, 27(7): 765-768 |
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| 作者姓名： | 吴昌聚 郁发新 金仲和 马慧莲 王跃林 |
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| 作者单位： | 浙江大学信息与电子工程系,杭州,310027 |
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| 基金项目： | 国家自然科学基金;国家高技术研究发展计划(863计划) |
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| 摘 要： | 从片子的生长工艺出发对腐蚀前端的形状进行了研究。提出了应力是产生腐蚀前端三角形的主要原因的推测，并通过退火实验验证了这一推测。在对退火处理影响腐蚀速率机制研究的基础上，得出了不同退火条件对腐蚀速率的影响规律。
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| 关 键 词： | 退火 牺牲层 腐蚀形状 腐蚀速率 |
| 修稿时间： | 2005-01-01 |
Effect of annealing on etching profile of sacrificial layer and etching rate |
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| Wu Changju,Yu Faxin,Jin Zhonghe,Ma Huilian,Wang Yuelin. Effect of annealing on etching profile of sacrificial layer and etching rate[J]. Chinese Journal of Scientific Instrument, 2006, 27(7): 765-768 |
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| Authors: | Wu Changju Yu Faxin Jin Zhonghe Ma Huilian Wang Yuelin |
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| Abstract: | The growth technology of the samples is first described.Then the profile of etching front is studied and the forming factors of the triangle at etching front are analyzed.The results show that the major factor of the triangle formation is stress.Through the study on mechanism of the effects of annealing treatment on etching rate,several laws are obtained,which show different annealing conditions have different effects on the etching rate. |
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| Keywords: | annealing treatment sacrificial layer etching profile etching rate |
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