| 21世纪的硅基材料--SOI |
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| 引用本文： | 崔朝宏. 21世纪的硅基材料--SOI[J]. 电子工艺技术, 2000, 21(2): 57-59 |
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| 作者姓名： | 崔朝宏 |
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| 作者单位： | 天津大学,天津 300072 |
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| 摘 要： | 介绍了SOI材料的发展及主要制备技术 ,对其应用前景也作了详尽论述。
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| 关 键 词： | 硅基材料 制备技术 应用前景 |
| 文章编号： | 1001-3474(2000)02-0057-03 |
| 修稿时间： | 1999-09-23 |
Material of Silicon Integrated for The Twenty First Century |
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| CUI Chao-hong. Material of Silicon Integrated for The Twenty First Century[J]. Electronics Process Technology, 2000, 21(2): 57-59 |
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| Authors: | CUI Chao-hong |
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| Abstract: | Describe the development and the major manufacturing technology of silicon on insulator.The application status is also presented. |
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| Keywords: | SOI Manufacturing technolog Application status |
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