Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition |
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| Authors: | Jung Ho SHIN,Kwang Soo CHOI,Tie-gang WANG,Kwang Ho KIM,Roman NOWAK,.National Core Research Center for Hybrid Materials Solution,Pusan National University,Busan,-,Korea ,. |
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| Affiliation: | National Core Research Center for Hybrid Materials Solution,Pusan National University,Busan 609-735,Korea;2.School of Materials Science and Engineering,Pusan National University,Busan 609-735,Korea;3.State Key Laboratory of Corrosion and Protection,Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China;4.School of Chemical Technology,Aalto University,Aalto 00076,Finland |
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| Abstract: | Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN phase |
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