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电子束重熔处理对硅化物涂层表面形貌和性能的影响
引用本文:于斌,何俊,刘志栋,靳庆臣,陈威,王祥龙.电子束重熔处理对硅化物涂层表面形貌和性能的影响[J].真空与低温,2009,15(3):149-152.
作者姓名:于斌  何俊  刘志栋  靳庆臣  陈威  王祥龙
作者单位:兰州物理研究所,甘肃,兰州,730000
摘    要:在Nb521铌合金表面采用料浆烧结法制备硅化物涂层,利用高频扫描电子束对硅化物涂层进行重熔处理,通过扫描电子显微镜对处理样品表面形貌进行组织结构分析。研究表明,经过电子束重熔处理,硅化物涂层表面陶瓷晶粒粒度降低,表面粗糙度降低,陶瓷颗粒之间烧结作用增强,重熔区域与未处理区域具有明显的边界,电子束能量分布较均匀。电子束重熔增强了陶瓷涂层的烧结作用,涂层致密度增加,硅化物层的抗氧化性能和抗热震性能提高。

关 键 词:电子束重熔  涂层  形貌  烧结  表面粗糙度  高温抗氧化性能

EFFECT OF ELECTRON BEAM RE-MELTING ON SURFACE MOTPHOLOGY AND PROPERTIES OF SILICIDE COATING
YU Bin,HE Jun,LIU Zhi-dong,JIN Qing-chen,CHEN Wei,WANG Xiang-long.EFFECT OF ELECTRON BEAM RE-MELTING ON SURFACE MOTPHOLOGY AND PROPERTIES OF SILICIDE COATING[J].Vacuum and Cryogenics,2009,15(3):149-152.
Authors:YU Bin  HE Jun  LIU Zhi-dong  JIN Qing-chen  CHEN Wei  WANG Xiang-long
Affiliation:(Lanzhou Institute of Physics, Lanzhou 730000, China)
Abstract:The silicide coating was prepared by fused slurry method on Nb521 alloy, the silicide coating was re-mehed by high frequency electron beam, the morphology of specimen was analyzed by SEM. It is found that after electron beam re-melt process, the surface ceramic grain granularity and surface roughness decrease, the sintering effect between ceramic grains increased, the obvious boundary was found between primary region and region re-melted, it prove that the energy distributing is well-proportioned. The silicide coating" sintering effect increased after EB re-melting process, and the coating became dense, the surface roughness of coating decrease, the high-temperature oxidation resistance and shock testing validate capability improved.
Keywords:electron beam re-melting  coating  molophology  sintering  surface roughness  high-temperature oxidation resistance capability
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