| 基于非硅微加工技术的超疏水表面的设计和制造 |
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| 引用本文： | 汪红,李光杨,杨卓青,姚锦元,丁桂甫.基于非硅微加工技术的超疏水表面的设计和制造[J].纳米技术与精密工程,2012,10(3):273-277. |
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| 作者姓名： | 汪红 李光杨 杨卓青 姚锦元 丁桂甫 |
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| 作者单位： | 1. 微米/纳米加工技术国家级重点实验室,上海,200240
2. 上海交通大学微纳科学技术研究院,上海,200240 |
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| 摘 要： | 利用非硅微加工技术,在金属基底表面构建了由圆柱状金属镍组成的规则的微阵列结构,研究了微阵列的疏水性.利用正己烷溶解十八烷基三氯硅烷(OTS)配制成涂覆液,对微阵列进行低表面能物质涂覆.通过对比涂覆前后的静态超疏水性,研究了低表面能物质涂覆的作用.实验发现圆柱高度为5～30μm、直径为30～50μm、间距为15～50μm的微结构阵列在不涂覆OTS的前提下表现出了稳定的超疏水性.涂覆OTS虽然没有增加阵列结构的接触角,但是改善了微阵列在水流冲击下的疏水性.
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| 关 键 词： | 超疏水 非硅微加工 接触角 掩膜电镀 |
Design and Fabrication of Super-Hydrophobic Surface Based on Non-Silicon Micro Machining Technology |
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| WANG Hong
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LI Guang-yang
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YANG Zhuo-qing
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YAO Jin-yuan
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DING Gui-fu.Design and Fabrication of Super-Hydrophobic Surface Based on Non-Silicon Micro Machining Technology[J].Nanotechnology and Precision Engineering,2012,10(3):273-277. |
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| Authors: | WANG Hong LI Guang-yang YANG Zhuo-qing YAO Jin-yuan DING Gui-fu |
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| Affiliation: | 1.National Key Laboratory of Nano/Micro Fabrication Technology,Shanghai 200240,China; 2.Research Institute of Nano/Micro Science and Technology,Shanghai Jiao Tong University,Shanghai 200240,China) |
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| Abstract: | The micro arrays consisting of hydrophilic nickel cylinders were fabricated on metal substrate based on non-silicon micro machining technology,and the hydrophobicity of the array was investigated.The prepared micro array was coated by octadecyltrichlorosilane（OTS） that dissolved in normal hexane.With the comparison of hydrophobicity before and after the coating,the effect of the coating of OTS was discussed.The experimental results showed that,without any low-surface-energy material coating,the array,with the height of 5—30 μm,the diameter of 30—50 μm and the patch size of cylinder of 15—50 μm,exhibited super-hydrophobicity with all the contact angles larger than 150°.The coating of OTS failed to increase contact angle of array,but it improved the hydrophobicity under the strike of water flow. |
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| Keywords: | super hydrophobicity non-silicon micro machining contact angle patterned electrodeposition |
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