| 多路高精度扩散炉温度控制系统的设计 |
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| 引用本文： | 张瀚文,张博,杜岩,李栋,孟国营.多路高精度扩散炉温度控制系统的设计[J].微型机与应用,2013,32(17):83-85,88. |
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| 作者姓名： | 张瀚文 张博 杜岩 李栋 孟国营 |
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| 作者单位： | 中国矿业大学(北京)机电与信息工程学院,北京,100083 |
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| 摘 要： | 针对传统的扩散炉温度控制系统的精度低、生产工艺控制能力差的现状，设计实现了扩散炉多路高精度温度检测控制系统。系统采用三路热电偶采集扩散炉内温度值并通过基于Smith预估的PID控制，控制三组加热装置的启停，以达到对炉温的控制，控制精度可达1‰，并采用液晶显示模块和按键组成人机交互界面。
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| 关 键 词： | 单片机 扩散炉 温度控制 热电偶 Smith预估器 |
Design of multiplex high-precision diffusion furnace temperature control system |
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| Zhang Hanwen
,
Zhang Bo
,
Du Yan
,
Li Dong
,
Meng Guoying.Design of multiplex high-precision diffusion furnace temperature control system[J].Microcomputer & its Applications,2013,32(17):83-85,88. |
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| Authors: | Zhang Hanwen Zhang Bo Du Yan Li Dong Meng Guoying |
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| Affiliation: | ( School of Mechanical Electronic and Information Engineering of CUMT. ( Beijing ) , Beijing 100083, China ) |
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| Abstract: | Based on the the low accuracy, poor control ability of the traditional diffusion furnace temperature control systems, the writer designed and implemented a multiplex high-precision diffusion furnace temperature control system. The system uses three way thermocouples to detect the temperature of diffusion furnace and control on-off operation of three way heaters after PID based on Smith predictive algorithm operation, in order to control the temperature of diffusion furnaces. The control precision can reach 1%o, and constituting the human-computer interaction interface via LCD and keyboard. |
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| Keywords: | single chip microcomputer diffusion furnace temperature control thermocouple smith predictive algorithm |
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