Noise and mismatch optimization for capacitive MEMS readout |
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| Zhang Chong, Wu Qisong, Yin Tao, Yang Haigang. Noise and mismatch optimization for capacitive MEMS readout[J]. Journal of Semiconductors, 2009, 30(11): 115003. doi: 10.1088/1674-4926/30/11/115003 Zhang C, Wu Q S, Yin T, Yang H G. Noise and mismatch optimization for capacitive MEMS readout[J]. J. Semicond., 2009, 30(11): 115003. doi: 10.1088/1674-4926/30/11/115003.Export: BibTex EndNote |
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| Authors: | Zhang Chong Wu Qisong Yin Tao Yang Haigang |
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| Affiliation: | Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Graduate University of the Chinese Academy of Sciences, Beijing 100049, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Graduate University of the Chinese Academy of Sciences, Beijing 100049, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China |
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| Abstract: | This paper presents a high precision CMOS readout circuit for a capacitive MEMS gyroscope. A continuous time topology is employed as well as the chopper noise cancelling technique. A detailed analysis of the noise and mismatch of the capacitive readout circuit is given. The analysis and measurement results have shown that thermal noise dominates in the proposed circuit, and several approaches should be used for both noise and mismatch optimization. The circuit chip operates under a single 5 V supply, and has a measured capacitance resolution of 0.2 aF/√Hz. With such a readout circuit, the gyroscope can accurately measure the angular rate with a sensitivity of 15.3 mV/°/s. |
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| Keywords: | high precision readout capacitive MEMS |
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