The influence of microstructure on the electronic properties of thin films of barium strontium titanium oxide composites |
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Authors: | M. W. Cole S. Sengupta S. Stowell C. W. Hubbard E. H. Ngo |
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Affiliation: | Army Research Laboratory, Weapons and Materials Research Directorate APG , MD , 21005-5069 |
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Abstract: | Abstract Microstructural and electrical properties were investigated for barium strontium titanium oxide (BSTO) magnesium oxide doped (0 to 10 wt.%) thin films deposited by the pulsed laser deposition (PLD) method on Pt/TiOx/SiO2/Si substrates. The dielectric properties were found to be strongly dependent on composition and microstructure. In cross-section, all films exhibited a columnar polycrystalline microstructure with vertical orientation deviations dictated by the surface roughness of the Pt electrode. A uniform granular microstructure was observed for all films in plan view. The dielectric constant, loss tangent and grain size decreased with increasing MgO concentration. |
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Keywords: | doped BSTO films microstructure dielectric properties |
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