Effects of Ti/Ir top electrodes of PZT capacitors on the hydrogen related degradation

Abstract

Hydrogen annealing damages on properties of PZT capacitors and a role of Ti/Ir hybrid structure top electrodes on capacitors are investigated in this study. It is demonstrated that the capacitors with Ti/Ir structure top electrodes improve a resistance against hydrogen related degradation. As the thickness ratio of Ti/Ir increases, the capacitors show enhanced endurance against hydrogen damages. Especially, PZT (350nm) capacitors with Ti(80nm)/Ir(20nm) hybrid top electrodes show only 26% decrease in nonvolatile polarizations (P?_r) under ± 7V, while 67% of P?_r of ferroelectric capacitors with Ir top electrodes is reduced after forming gas annealing at 250°C for 10min. Based on the XPS analysis, ferroelectric characteristics of PZT thin film capacitors are degraded by destruction of Pb-O bond into metallic Pb due to hydrogen anneal on the catalytic top electrodes (Ir, Pt).