Fabrication process of pzt piezoelectric cantilever unimorphs using surface micromachining |
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| Authors: | Joon Han Kim Lei Wang Shayne M. Zurn Li Li Young Soo Yoon Dennis L. Polla |
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| Affiliation: | Department of Electrical Engineering , University of Minnesota , 200 Union St. S. E., Minneapolis, MN55455, USA |
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| Abstract: | Abstract This paper discusses the fabrication process and challenges for fabrication of piezoelectric cantilever beam microaccelerometers by using surface micromachining techniques. PZT thin films were used as the piezoelectric material to detect the acceleration of the cantilever beam. In this paper, we discuss in detail the process challenges encountered in piezoelectric microaccelerometers. These major challenges include PZT thin film deposition and encapsulation during final micromachining membrane release. |
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| Keywords: | ferroelectric 2T2C memory sense amplifier data state preference retention |
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