Growth and electrical properties of Pb(Zr,Ti)O3 thin films by sputtering using an alloy target

Abstract

Pb(Zr_x,Ti_1?x)O₃ thin films were deposited on Pt/SiO₂/Si substrates by the rf magnetron sputtering using an alloy target consisting of Zr-Ti alloy and Pb metal. The dependence of electrical properties on film thickness and sputtering gas pressure was investigated. The dielectric constant and the remanent polarization decreased and the coercive field increased with the decrease of the film thickness. In the dependence of gas pressure, the relative dielectric constant of the film with only a perovskite phase were in the range of 235–280, which were higher than those of the film with only a pyrochlore phase, 20. The asymmetry of hysteresis loops increased with the decrease of the gas pressure.