Growth of BaTiO3/SrTiO3 superlattices by injection MOCVD |
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| Authors: | J Lindner F Weiss J P Senateur W Haessler G Köbernik S Oswald |
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| Affiliation: | 1. LMGP, INPG, CNRS , Grenoble, France;2. Kackertstr , 15-17, AIXTRON AG, Aachen, Germany;3. LMGP, INPG, CNRS , Grenoble, France;4. IFW , Dresden, Germany |
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| Abstract: | Abstract BaTiO3 (BTO) and SrTiO3 (STO) and BaxSr1-xTiO3 (x=0–1) (BST) thin films have been epitaxially grown on LaAlO3 and SrTiO3:Nb at a substrate temperature of 800°C using a new liquid source delivery technique called injection MOCVD. A X-ray study evidenced FWHMs of 0.16° and 0.45° for SrTiO3 and BaTiO3 respectively. In a next step the feasibility of BaTiO3/SrTiO3 superlattices was studied. The multilayers obtained were epitaxially grown on LaAlO3 as well as on SrTiO3:Nb. The structural properties were studied using X-ray diffraction as well as XPS, proving the low interface roughness of 1nm. The XPS study also confirmed the absence of carbon contamination in the film. |
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| Keywords: | Injection MOCVD Films BaxSr1-xTiO3 Superlattices X-ray |
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