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CHARACTERIZATION OF FERROELECTRIC FILMS UP TO 60 Ghz: APPLICATION TO PHASE SHIFTERS |
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| Authors: | G VÉLU L BURGNIES G HOUZET K BLARY D LIPPENS J C CARRU |
| Affiliation: | 1. LEMCEL, Université du Littoral-C?te d'Opale , 50 rue F. Buisson, BP 717, 62228 , Calais , France;2. IEMN, Université des Sciences et Technologies de Lille , Avenue Poincaré, BP 60069, 59652 , Villeneuve d'Ascq , France |
| Abstract: | ABSTRACT Paraelectric Ba0.5Sr0.5TiO3 films 0.3 μm thick have been deposited by sol-gel on c-axis sapphire substrates. They have been investigated from 1 kHz to 60 GHz using coplanar waveguide transmission lines and interdigitated capacitors. The dielectric constant εr is around 300 and the loss tangent is 0.16 at 50 GHz. The tunability is constant with frequency with a mean value of 42%. Analog phase shifters were subsequently fabricated. A 180° phase shift was obtained at 60 GHz with a 17 V bias. The maximum value of phase shift per decibel of insertion losses (at 0 V) is 13°/dB at 30 GHz with a bias of 30 V. |
| Keywords: | BaSrTiO3 paraelectric microwave characterization analog phase shifter |