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Analysis of thin PZT films as a function of depth and thickness by GIXS |
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| Authors: | M. Petit V. Nagarajan S. Aggarwal R. Ramesh L. J. Martinez-Miranda |
| Affiliation: | Department of Materials and Nuclear Engineering , Materials Research Science and Engineering Center, University of Maryland , College Park, MD, 20742, USA |
| Abstract: | Abstract We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. |
| Keywords: | epitaxial ferroelectric films grazing incidence X-ray scattering depth analysis in-plane strain |