NON DESTRUCTIVE DIELECTRIC CHARACTERIZATION OF THIN FERROELECTRIC FILMS MATERIALS USING COPLANAR LINE STRUCTURE

ABSTRACT

This paper presents a nouvelle and non-destructive Broadband characterization method which uses a coplanar line for the measurement of the complex permittivity of linear dielectric materials and precisely, that of ferroelectric thin films. The method uses the transmission coefficient and the quasi-TEM analysis to find the effective permittivity of the multilayer system, and then the coplanar conformal mapping technique is employed to extract the relative permittivity of the thin layer. Comparing our results to those of cavity resonator method at 12 GHz shows a good agreement. The measurement is done in the microwave frequency band (45 MHz–20 GHz).