Multi-Step Growth of Oriented LiNbO 3 Thin Films |
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Authors: | V. Bornand I. Huet Ph. Papet |
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Affiliation: | Laboratoire de Physicochimie de la Matière Condensée, UMR CNRS 5617 , UM II , Place E. Bataillon, C.C. 003, MONTPELLIER cedex 5 , F-34095 , France |
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Abstract: | Highly-oriented LiNbO 3 thin films have been successfully synthesized through a refined 2-step growth process consisting of the successive use of a physical technique (r.f. sputtering) and a chemical one (pyrosol). Taking the strict control of processing parameters, a <001>-preferential out-of-plane orientation could be promoted on both <001>-Al 2 O 3 and <111>-Si substrates while the in-plane texture of the deposited layers was found to depend strongly upon the nature of the underlying templates. |
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Keywords: | Lithium Niobate Linbo 3 Thin Films Oriented Growth r.f. Sputtering Pyrosol Ferroelectric Materials |
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