LEAKAGE CURRENT CHARACTERISTICS OF Pt/Ba0.6Sr0.4TiO3/Pt THIN-FILM CAPACITORS |
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| Authors: | CHUNLIN FU FUSHENG PAN WEI CAI |
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| Affiliation: | 1. School of Metallurgical and Materials Engineering , Chongqing University of Science and Technology , Chongqing , 400050 , China;2. School of Materials Science and Engineering , Chongqing University , Chongqing , 400044 , China;3. School of Materials Science and Engineering , Chongqing University , Chongqing , 400044 , China;4. School of Metallurgical and Materials Engineering , Chongqing University of Science and Technology , Chongqing , 400050 , China |
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| Abstract: | ABSTRACT Leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt ferroelectric thin-film capacitors were investigated at the temperature range from 273 K to 393 K. It is implied that there are two conduction regions in the capacitors, i.e. ohmic behavior at low voltage (< 0.4 V) and Poole-Frenkel or Schottky emission mechanism at high voltage (> 1.8 V). The depletion layer widths calculated from Poole-Frenkel model and Schottky emission model are 36.9 nm～ 61.5 nm and 6.8 nm～ 11.5 nm, respectively. Moreover, the trapped level, the Schottky barrier height, the constant and the effective Richardson constant are 0.56 V, 0.49 V, 0.227A/cm2 · V and 1.15 × 10?7 A/cm2 · K2, respectively. |
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| Keywords: | Barium strontium titanate thin film leakage current Poole-Frenkel Schottky emission |
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