The influence of synthesis temperature on structure properties of SrTiO3 ferroelectric films |
| |
| Authors: | V E Loginov A V Tumarkin M V Sysa O U Buslov M M Gaidukov A I Ivanov |
| |
| Affiliation: | St. Petersburg State Electrotechnical University , 5 Prof. Popov str. St., Petersburg, 197376, Russia |
| |
| Abstract: | Abstract The results of structure investigations of SrTiO3 films depending on synthesis temperature are presented and electrical characteristics of 4-electrode planar capacitors based on prepared films are investigated. Finally, the technological conditions of high structure quality SrTiO3 films preparation are determined. SrTiO3 films prepared under these conditions possess electrical characteristics sufficient for room temperature MW applications in a wide frequency range., Keywords: RF magnetron sputtering, SrTiO3 |
| |
| Keywords: | |
|
|
