Epitaxial Ba0.5Sr0.5TiO3 thin films for microwave phase shifters |
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| Authors: | B. J. Kim S. Baik Y. Poplavko Y. Prokopenko J. Y. Lim B. M. Kim |
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| Affiliation: | 1. Dept. of Materials Science and Engineering , Pohang University of Science and Technology (POSTECH) , Pohang, 790–784, KOREA;2. National Technical University of Ukraine , 37, Peremogi Ave, 252056, Kiev, UKRAINE;3. School of Electronic and Computer Engineering, POSTECH , Pohang, 790–784, KOREA |
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| Abstract: | Abstract A tunable phase shifter was fabricated with epitaxial Ba0.5Sr0.5TiO3 (BST) thin film and gold coplanar waveguide. BST thin film of the thickness ～0.5 μm was deposited by laser ablation on the MgO(OOl) single crystalline substrate. Gold electrode of the thickness ～2 μm was prepared by the sequence of thermal evaporation, electroplating, and wet etching. Epitaxial quality of the BST thin film was confirmed by X-ray diffraction. The microwave performance of phase shifter was measured at room temperature in the frequency range of 8–12 GHz, and with applied bias voltage of up to 30 V. Effect of Mn dopant in the epitaxial films was also considered. |
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| Keywords: | Ferroelectric thin films coplanar waveguide phase shifter |
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