Dielectric and Pyroelectric Properties of Lead Zirconate Titanate Composite Films

A new sol-gel approach has been established to prepare dense and crack-free lead zirconate titanate (PZT)/PZT composite films. This new process combines the modified sol-gel method for preparing ceramic/ceramic composite films and the infiltration technique. In the modified sol-gel method, sintered PZT powder is dispersed in a PZT precursor solution to form a slurry which is then spin-coated on a substrate. However, the resulting composite film usually contains a considerable amount of pores, and thus resulting in serious degradation of the mechanical, ferroelectric and piezoelectric properties of the films. In the present work, an additional step, infiltration, has been included in the method. A diluted PZT precursor solution is deposited on the composite film to infiltrate and fill-up the pores, and hence a dense composite film is obtained. The dielectric, ferroelectric and pyroelectric properties of the resulting PZT/PZT composite film are comparable to those of a sol-gel derived PZT film; showing the values of 1200, 0.04, 21 μC/cm² and 180 μC/m² K for relative permittivity, dielectric loss, remanent polarization and pyroelectric coefficient, respectively.