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High frequency dielectric properties of thin-film PZT capacitors |
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| Authors: | W. Williamson Iii B. K. Gilbert H. D. Chen K. R. Udayakumar L. E. Cross C. M. Bozler |
| Affiliation: | 1. Special Purpose Processor Development Group , Mayo Foundation , Rochester, MN, 55905;2. Materials Research Laboratory , Pennsylvania State University , University Park, PA, 16802-4801;3. High Speed Microelectronics Group, MIT Lincoln Laboratory , Lexington, MA, 02173-9108 |
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