Preparation,microstructure, and ferroelectric properties of laser-deposited thin BaTiO3 and lead zirconate-titanate films |
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| Authors: | P S Brody B J Rod K W Bennett L P Cook P K Schenck M D Vaudin |
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| Affiliation: | 1. Harry Diamond Laboratories , Adelphi, MD, 20783;2. National Institute of Standards and Technology Gaithersburg , MD, 20899 |
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| Abstract: | Abstract Ferroelectric thin films of BaTiO3 and lead zirconate titanate, PbZr0.53Ti0.47O3 (PZT), have been prepared by pulsed excimer laser deposition. The microstructure and crystallography of these films have been studied by scanning electron microscopy (SEM), energy dispersive x-ray spectrometry (EDX), transmission electron microscopy (TEM), x-ray diffraction (XRD), and differential scanning calorimetry (DSC). Electrical properties, including remanent polarization, dielectric loss, and dielectric constant, have been measured. Also, switched remanent polarization has been measured under conditions of continuous cycling. |
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