PZT MEMS for an Extremely Sensitive Magnetometer |
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| Authors: | Eugene Zakar Ronald Polcawich Madan Dubey Jeff Pulskamp Alma Wickenden John Conrad |
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| Affiliation: | U.S. Army Research Laboratory, SEDD, 2800 Powder Mill Rd., Adelphi, Maryland 20783, USA |
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| Abstract: | The application of a Pt/PZT/Pt sandwich structure in place of a polysilicon material for a xylophone magnetometer bar can greatly improve the sensitivity of the device. This is the first time a piezoelectric activation has been used to resonate a xylophone bar comprised of SiO2/Ta/Pt/PZT/Pt. Both optical beam and scanning laser Doppler vibrometer methods were used for characterizing the bar deflection. A fabrication process for freely suspended xylophone magnetometer bars is presented. When the device was placed in a vacuum ambient the Quality factor improved to a value of 1800. |
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| Keywords: | Sensor magnetometer PZT sol-gel piezoelectric MEMS |
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