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EXAFS Characterization of the Gel Leading to a Hydrothermal Deposition of PZT Films
Authors:SÉBASTIEN EUPHRASIE  SYLVIE DAVIERO-MINAUD  PHILIPPE PERNOD
Affiliation:1. IEMN (Institut d'Electronique, de Microélectronique et de Nanotechnologie), CNRS/UMR 8520, DOAE, Ecole Centrale de Lille , BP 69, 59652 Villeneuve d'Ascq Cedex, France;2. LCPS (Laboratoire de Cristallochimie et Physicochimie du Solide), CNRS/UMR 8012, Ecole Nationale Supérieure de Chimie de Lille , BP 108, 59652 Villeneuve d'Ascq Cedex, France
Abstract:Pb(Zr0.52,Ti0.48)O3 (PZT) polycrystalline films were produced by a hydrothermal synthesis on titanium substrates. It uses a single-step process, user-friendly precursors and a sand bath with a temperature lower than 200°C. In order to have a better understanding of the growth phenomena, a study of the precursor gel using X-ray absorption spectroscopy has been made.
Keywords:PZT films  hydrothermal method  EXAFS
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